Overview

The INFICON UL1000 Fab is a mobile dry helium leak detector specifically engineered to meet the stringent requirements of semiconductor manufacturing, cleanrooms, and high-vacuum applications.

Equipped with an integrated dry scroll pump, it guarantees hydrocarbon- and particle-free testing, making it the ultimate solution for leak detection on semiconductor process equipment, vacuum components, and sealed vessels.

Key Features & Benefits

• Contamination-Free (Dry System): Powered by a high-capacity dry compressing scroll pump (25 m³/h), allowing safe operation in cleanroom environments without any risk of oil contamination.

• Rapid Response Technology (I·CAL): Features the proprietary I·CAL software algorithm, enabling real-time detection of tiny leaks down to the 10⁻¹¹ and 10⁻¹² mbar l/s range without response delay.

• Intelligent Background Suppression (iZERO): Automatically suppresses background helium levels to deliver fast, accurate measurements without masking real leaks.

• Cleanroom-Optimized Design: Engineered airflow prevents disruption to laminar airflow systems in cleanroom setups.

• User-Friendly Interface: Features an intuitive rotatable display and supports both wired and wireless remote control options (RC1000).

• Automatic Calibration: An integrated, calibrated internal test leak ensures consistent measurement accuracy before every test cycle.

Testing Modes INFICON UL1000

The ul1000 leak detector offers versatile testing modes to handle various application requirements:

• Vacuum Mode (Spray Method):

  • GROSS Mode (Inlet P > 15 mbar): Initial test phase for large-volume chambers or high leak rate detection.

  • FINE Mode (Inlet P < 2 mbar): Intermediate mode for detecting medium-range leaks.

  • ULTRA Mode (Inlet P < 0.4 mbar): High-sensitivity mode capable of identifying micro-leaks down to 10⁻¹² mbar l/s.

• Sniffer Mode (Sniffer Probe Method): Designed for overpressure leak testing from the outside using an optional sniffer probe (detectable down to < 5 x 10⁻⁸ mbar l/s).

• Auto-Sequence / Smart Test Mode: Automatically manages crossover pressures to optimize cycle times for high-throughput testing.

Common Operational Issues & Troubleshooting

Here is a quick troubleshooting guide for common field issues INFICON UL1000:

• “Helium Background High” Alert:

  • Cause: Elevated ambient helium levels or residual tracer gas from previous test runs.

  • Solution: Enable the iZERO feature to suppress background noise, or purge the system with dry nitrogen gas.

• Slow Pump-Down Time:

  • Cause: Contamination on the inlet flange, worn O-rings, or a major gross leak in the test setup.

  • Solution: Clean the inlet flange seals, inspect O-rings for wear, and verify all connection fittings.

• “Filament Error / Filament Burned” Warning:

  • Cause: Mass spectrometer filament burnout due to extended wear or sudden exposure to atmospheric pressure.

  • Solution: The system will automatically switch to the secondary backup filament. Schedule an ion source assembly replacement soon after.

• Calibration Failed:

  • Cause: Depleted/clogged internal test leak or the system has not reached operating temperature.

  • Solution: Allow the unit a 15–20 minute warm-up period before initiating auto-calibration.

Spare Parts & Maintenance

Regular preventive maintenance and genuine replacement parts are recommended to ensure long-term reliability:

• Routine Maintenance:

  • Daily / Weekly: Clean the inlet flange, inspect O-rings, and run daily calibration checks.

  • Annual Service: Perform routine dry scroll pump service (tip seal replacement) and clean the spectrometer cell.

• Popular Spare Parts & Accessories:

  • Ion Source / Filament Assembly: Long-life dual iridium/yttria-coated filaments.

  • Internal Calibrated Test Leak: Traceable reference leak standard for ISO/QS compliance.

  • Scroll Pump Tip Seal Kit: Wear-and-tear replacement kit to maintain peak vacuum performance.

  • Optional Accessories: Sniffer probes (various hose lengths), RC1000 Remote Control (Wired/Wireless), and TC1000 Test Chamber.

Technical Sp ecifications

Feature / Parameter	Specification
Minimum Detectable Leak Rate (Vacuum)	< 5 x 10⁻¹² mbar l/s
Minimum Detectable Leak Rate (Sniffer)	< 5 x 10⁻⁸ mbar l/s
Detectable Gases	Helium (4He, 3He), Hydrogen (H2) / Mass 2, 3, 4 amu
Fore-Vacuum Pump Type	Dry Scroll Pump (25 m³/h)
Detector / Mass Spectrometer	180° Magnetic Sector Field
Inlet Connection	DN 25 KF (optional DN 40 KF)
Response Time	< 1 second
Dimensions & Weight	1050 x 472 x 987 mm / approx. 110 kg

Applications

• Maintenance and quality control in Semiconductor & Fab facilities.

• Leak checking on vacuum chambers, gas distribution lines, and valves.

• Testing hermetically sealed electronic packages and components.

• High-vacuum system manufacturing and laboratory research.

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